By Shen Dong, Yingxue Yao

Precision engineering and micro/nano applied sciences were constructing speedily lately, and are set to develop into the dominant gamers in a brand new business revolution of the twenty first century. they won't in basic terms offer new percentages for exponential improvement of the worldwide financial system, but in addition reason a revolution in human figuring out. the current assortment goals to supply the reader with the main up to date details on precision production idea and strategies, ultra-precision measurements and keep an eye on platforms, ultra-precision machining platforms and micro/nano expertise. The publication may be useful to creation and learn engineers, learn scholars and teachers operating within the box. the purpose of this undertaking is to advertise the alternate of data and cooperation among specialists within the fields of precision engineering, and micro and nano applied sciences

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The head of ESPT is the same as that of SSPT. It also has a ballonet made of rubber covered polishing cloth and inner air pressure can be controlled on-line. The difference between the two tools is in driving mode. There is not an inner motor in ESPT and it needs an external power source to drive the polishing head rotating. The spindle of ESPT can be clamped on the drive of a machine, such as a milling machine, a drill press or a machining center. It can obtain the driving power from the drives of these machines to drive the polishing head rotating in a high-speed.

Air bearings, however, have the advantage of high repeatability and motional accuracy due to mechanical guides and accuracy averaging effects, and they never generate magnetic fields [3–5]. However, in order to use air bearings in a vacuum, it is necessary to minimize the leakage of air, which deteriorates the degree of vacuum. Many studies [3–10], most of them resulting in patents [6–10], have examined this problem, and they have commonly adopted a differential exhaust method. There are no major differences among the differential exhaust methods proposed by the various studies: each exhausts air through several stages of seal using a vacuum pump so that air cannot leak into the vacuum chamber.

The pumping speed was also selected as a design parameter to determine the technical limit of the pump. The number of exhaust stages was excluded to maintain the number of design parameters as a constant, otherwise optimization would have been extremely difficult. Constraint conditions. The constraint conditions were the spatial constraint of the gas-recovering region and the technical constraint of the pump. The spatial constraint limited the overall length of the gas-recovering region to maintain the dynamic stability and overall size of the system, Shen Dong and Yingxue Yao g0 : n ∑ (l i =1 si + di ) ≤ L 41 (7) where lsi is the length of the ith seal, di is the diameter of the ith exhaust tube, and L is the maximum length of the gas-recovering region.

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