By Joseph W. Goodman (auth.), Wolfgang Osten (eds.)

In continuation of the perimeter Workshop sequence this continuing includes all contributions awarded on the 7. foreign Workshop on complex Optical Imaging and Metrology. the perimeter Workshop sequence is devoted to the presentation, dialogue and dissemination of modern leads to Optical Imaging and Metrology. themes of specific curiosity for the 7. Workshop are:
- New tools and instruments for the new release, acquisition, processing, and evaluate of knowledge in Optical Imaging and Metrology (digital wavefront engineering, computational imaging, model-based reconstruction, compressed sensing, inverse difficulties answer)
- Application-driven applied sciences in Optical Imaging and Metrology (high-resolution, adaptive, energetic, powerful, trustworthy, versatile, in-line, real-time)
- High-dynamic diversity options in Optical Imaging and Metrology (from macro to nano)
- Hybrid applied sciences in Optical Imaging and Metrology
(hybrid optics, sensor and information fusion, model-based ideas, multimodality)
- New optical sensors, imaging and dimension platforms
(integrated, miniaturized, in-line, real-time, traceable, distant)

Special emphasis is wear new recommendations, taking into consideration the energetic mixture of actual modeling, machine aided simulation and experimental info acquisition. specifically cognizance is directed in the direction of new methods for the extension of current answer limits that open the gates to wide-scale metrology, starting from macro to nano, by means of contemplating dynamic adjustments and utilizing complicated optical imaging and sensor systems.

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Extra info for Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology

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The images are obtained by a Fourier transform lens, which rotates the Wigner distribution leaving the hologram plane by 90 deg. The images both exist in the focal plane of the lens. We can obtain the intensity distributions in these images by projecting theWigner distribution orthogonally onto the x axis. 2 Fresnel Holograms Next we consider Fresnel holograms recorded in the geometry shown in Fig. 7. Fig. 7 Fresnel holography recording geometry The object now lies in a different plane than the reference point, a plane that could be to the left or the right of the pinhole plane.

Further the deviation of two profiles at the 50% value from the real edge position at x = 5 µm show, that evaluation using the 50% criterion lead to systematic linewidth measurement errors of 140 nm and 420 nm, respectively. These results prove that a sufficiently high NA and use of the correct threshold is obligatory. Structures on real samples do not have perfect edges with an edge angle of 90°. On customer samples typically we measure edge angles between 30° and 85°. Fig. 75 (right). The microscope operates in transmission mode.

G. width or diameter) have to be performed for system calibrations and the reverification of the performance [1]. However, up to now the national metrology institutes (NMIs) are not able to offer internationally recognized bidirectional calibrations, which are covered by the Mutual Recognition agreement (MRA [2]) and documented in the key comparison database [3]. Currently only one NMI offers optical widths calibrations on suitable user-supplied samples, including line scales, as well. Furthermore many users are not aware of the specific difficulties of bidirectional measurements.

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